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SEMICONDUCTOR PLANT

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Technological building 101
Area 12337 m2.
The getting of polycrystalline silicon
in hydrogen reduction reactors
The equipment in special corrosion-resistant design,
with protection from trichlorosilane and hydrogen chloride:
Air Handling units:
- 20 pieces. Total air discharge rate 470000 m3/h
Technological building 104
Area 23000 m2.
A high cleanliness class of premises (1000, 10000)
Primary processing of polycrystalline silicon,
grinding, packing and wrapping.
The equipment in special corrosion-resistant design,
with protection from trichlorosilane and hydrogen chloride:
 Air Handling units:
- 42 pieces. Total air discharge rate 1 260 000 m3/h